Fluence-dependent sputtering yield of micro-architectured materials
Title | Fluence-dependent sputtering yield of micro-architectured materials |
Publication Type | Journal Article |
Year of Publication | 2017 |
Authors | Matthes, Chris S. R., Nasr M. Ghoniem, Gary Z. Li, Taylor S. Matlock, Dan M. Goebel, Chris A. Dodson, and Richard E. Wirz |
Journal | Applied Surface Science |
Volume | 407 |
Pagination | 223–235 |
Date Published | 02/2017 |
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