Implementation of in situ diagnostics for sputter yield measurements in a focused plasma
| Title | Implementation of in situ diagnostics for sputter yield measurements in a focused plasma |
| Publication Type | Conference Paper |
| Year of Publication | 2016 |
| Authors | Li, Gary Z., Chris A. Dodson, Richard E. Wirz, Taylor S. Matlock, and Dan M. Goebel |
| Conference Name | 52nd AIAA/SAE/ASEE Joint Propulsion Conference, Propulsion and Energy Forum |
| Date Published | 07/2016 |
| Conference Location | Salt Lake City, UT |
| Abstract | The Plasma-interactions test facility at UCLA features a high current hollow cathode plasma source that delivers a cylindrical plasma through solenoids to a target downstream. e near-target plasma is focused to a spot size of 1.5 cm for localized sputtering. e target is then biased negative with respect to the plasma potential to provide energetic ion bombardment. To perform in situ sputter yield measurements, a quartz crystal microbalance and optical emission spectroscopy have been implemented. Preliminary results for an argon plasma on molybdenum sputtering experiment are presented to validate these diagnostics. e quartz crystal microbalance method along with the traditional weight loss method produce sputter yields that agree well with published results. Angular distributions and emission spectra for these test cases are also provided. |
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